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金属研究所 [5]
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Experimental Investigation of Microstructure and Piezoresistive Properties of Phosphorus-doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by PECVD
会议论文
MICRO-NANO TECHNOLOGY XV, 2013-11-03
作者:
Pan, Haibin[1]
;
Ding, Jianning[2]
;
Cheng, Guanggui[3]
;
Cao, Baoguo[4]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/24
Hydrogenated nanocrystalline silicon thin films
PECVD
piezoresistive properties
microstructure
gauge factor
temperature coefficient of resistance
Low-temperature (120 degrees C) growth of nanocrystalline silicon films prepared by plasma enhanced chemical vapor deposition from SiCl4/H-2 gases: Microstructure characterization
期刊论文
Applied Surface Science, 2012, 卷号: 258, 期号: 7, 页码: 3221-3226
L. Zhang
;
J. H. Gao
;
J. Q. Xiao
;
L. S. Wen
;
J. Gong
;
C. Sun
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  |  
浏览/下载:14/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
PECVD
Microstructure
Raman spectra
hydrogenated amorphous-silicon
thin-films
raman-spectroscopy
solar-cells
mechanism
sih2cl2
Nanocrystalline silicon thin films grown by a MF twin magnetron sputtering system with two solenoid coils
期刊论文
Materials Letters, 2012, 卷号: 68, 页码: 367-369
J. H. Gao
;
L. Zhang
;
J. Q. Xiao
;
J. Gong
;
C. Sun
;
L. S. Wen
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  |  
浏览/下载:13/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
Thin films
Solenoid coil
Sputtering
microcrystalline silicon
fabrication
deposition
layer
tool
Influence of an External Magnetic Field on the Growth of Nanocrystalline Silicon Films Grown by MF Magnetron Sputtering
期刊论文
Journal of Materials Science & Technology, 2012, 卷号: 28, 期号: 11, 页码: 992-998
J. H. Gao
;
L. Zhang
;
J. Q. Xiao
;
J. Gong
;
C. Sun
;
L. S. Wen
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  |  
浏览/下载:14/0
  |  
提交时间:2013/02/05
Nanocrystalline silicon
Thin film
Solenoid coil
MF magnetron
sputtering
chemical-vapor-deposition
amorphous-silicon
thin-films
microstructure
temperature
fabrication
density
si
Effect of argon on the structure of hydrogenated nanocrystalline silicon deposited from tetrachlorosilane/hydrogen/argon plasma
期刊论文
Physica Status Solidi a-Applications and Materials Science, 2012, 卷号: 209, 期号: 6, 页码: 1080-1084
L. Zhang
;
J. H. Gao
;
J. Q. Xiao
;
L. S. Wen
;
J. Gong
;
C. Sun
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2013/02/05
hydrogen concentration
microstructure
nanocrystalline silicon
Raman
spectra
chemical-vapor-deposition
low-temperature growth
amorphous-silicon
microcrystalline silicon
raman-spectroscopy
solar-cells
thin-films
chemistry
mechanism
kinetics
Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells
期刊论文
cailiao gongcheng/journal of materials engineering, 2011, 期号: 8, 页码: 5-7+13
Liu, Shi-Yong
;
Zeng, Xiang-Bo
;
Peng, Wen-Bo
;
Yao, Wen-Jie
;
Xie, Xiao-Bing
;
Yang, Ping
;
Wang, Chao
;
Wang, Zhan-Guo
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  |  
浏览/下载:33/0
  |  
提交时间:2012/06/14
Amorphous films
Chemical vapor deposition
Energy gap
High resolution electron microscopy
High resolution transmission electron microscopy
Hydrogen
Nanocrystalline silicon
Optical band gaps
Plasma deposition
Plasma enhanced chemical vapor deposition
Raman spectroscopy
Semiconducting silicon compounds
Solar power generation
Thin films
Transmission electron microscopy
The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films
期刊论文
optoelectronics and advanced materials-rapid communications, 2011, 卷号: 5, 期号: 40545, 页码: 112-115
Hao HY
;
Xing J
;
Li WM
;
Zeng XB
;
Kong GL
;
Liao XB
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  |  
浏览/下载:81/3
  |  
提交时间:2011/07/06
Nanocrystalline silicon thin films
Structure
Photoelectrical properties
Stability
MICROCRYSTALLINE SILICON
TRANSITION FILMS
SOLAR-CELLS
HYDROGEN
The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films
期刊论文
Optoelectronics and advanced materials-rapid communications, 2011, 卷号: 5, 期号: 1-2, 页码: 112-115
作者:
Hao, Huiying
;
Xing, Jie
;
Li, Weimin
;
Zeng, Xiangbo
;
Kong, Guanglin
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2019/05/12
Nanocrystalline silicon thin films
Structure
Photoelectrical properties
Stability
Preparation of ITO thin films applied in nanocrystalline silicon solar cells
期刊论文
VACUUM, 2011, 卷号: 86, 页码: 290-294
作者:
Zhao Erjing
;
Zhang Weijia
;
Lin Jun
;
Yang Dongjie
;
Jacques, Havugimana Jean
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  |  
浏览/下载:3/0
  |  
提交时间:2020/01/06
ITO thin films
DC magnetron sputtering
Nanocrystalline silicon
Solar cells
Annealing environment effect on the nanocrystalline silicon related photoluminescence in silicon rich alumina films
期刊论文
2010, 2010
Bi, L.
;
He, Y.
;
Ma, K.
;
Feng, J.Y.
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浏览/下载:4/0
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