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Anodic bondable Li-Na-Al-B-Si-O glass-ceramics for Si - ULTCC heterogeneous integration
期刊论文
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2019, 卷号: 39, 期号: 7, 页码: 2419
作者:
Chen, Guanyu
;
Ma, Mingsheng
;
Liu, Zhifu
;
Wei, Anqing
;
Zavabeti, Ali
收藏
  |  
浏览/下载:83/0
  |  
提交时间:2019/12/26
ULTCC
Glass-ceramic
Anodic bonding
Activation energy
MEMS
Pressure sensor
Analysis on Vibration Performance of Slit-Resonant Beam Based on BP Neural Network
会议论文
Proceedings - 2018 International Conference on Sensing, Diagnostics, Prognostics, and Control, SDPC 2018, 2018-08-15
作者:
Meng, T.
;
Sun, Z.
;
Zhang, X.
;
Zhang, J.
;
Shi, H.
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/30
MEMS
Neural networks
Systems engineering
BP neural networks
Design and optimization
Neural network model
Resonant pressure sensors
Resonant sensors
Sensor performance
Slit-resonant beams
Vibration model
Vibration analysis
Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 2, 页码: 231-238
作者:
Chan, Elena
;
Lin, Dequan
;
Lu, Lei
;
Zhang, Deqiang
;
Guo, Shichao
收藏
  |  
浏览/下载:48/0
  |  
提交时间:2018/09/26
Pressure sensor
piezoresistive
MEMS
silicon
bulk
eutectic bonding
Realization and Characterization of a Bulk-Type All-Silicon High Pressure Sensor
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 2, 页码: 231-238
作者:
Chan, Elena
;
Lin, Dequan
;
Lu, Lei
;
Zhang, Deqiang
;
Guo, Shichao
收藏
  |  
浏览/下载:45/0
  |  
提交时间:2018/09/26
Pressure sensor
piezoresistive
MEMS
silicon
bulk
eutectic bonding
An optical fiber Fabry-Perot micro-pressure sensor based on beam-membrane structure
期刊论文
MEASUREMENT SCIENCE AND TECHNOLOGY, 2018, 卷号: 29
作者:
Tian, Bian
;
Zhan, Feng
;
Han, Feng
;
Li, Kaikai
;
Zhao, Na
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/26
beam-membrane structure
FP cavity
MEMS
micro-pressure
optical fiber sensor
A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement
期刊论文
SENSORS, 2018, 卷号: 18
作者:
Zhang, Guodong
;
Zhao, Yulong
;
Zhao, Yun
;
Wang, Xinchen
;
Wei, Xueyong
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  |  
浏览/下载:2/0
  |  
提交时间:2019/11/26
detonation pressure
manganin thin film
MEMS technology
microscale measurement
ultra-high pressure sensor
Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance
期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:
Zhang, Guo-Dong
;
Zhao, Yu-Long
;
Zhao, Yun
;
Wang, Xin-Chen
;
Wei, Xue-Yong
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  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
high-temperature resistance
microelectromechanical systems (MEMS) technology
silicon-on-insulator (SOI) piezoresistive element
small size
ultra-high pressure sensor
Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
期刊论文
Frontiers of Mechanical Engineering, 2017, 卷号: 12, 页码: 546-553
作者:
Xu, Tingzhong
;
Wang, Hongyan
;
Xia, Yong
;
Zhao, Zhiming
;
Huang, Mimi
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
low pressure sensor
medical application
MEMS
peninsulaisland
ultra-high sensitivity
A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 卷号: 244, 页码: 66-76
作者:
Xu, Tingzhong
;
Zhao, Libo
;
Jiang, Zhuangde
;
Guo, Xin
;
Ding, Jianjun
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Peninsula-island structure
Sensitivity
Ultra-low pressure sensor
Non-linearity
MEMS
In-situ Assembly for MEMS Based Pressure Sensor
会议论文
作者:
Shang, Yuanfu
;
Cao, Wan
;
Liu, Sheng
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/05
MEMS
In-situ assembly
Pressure sensor
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