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Fabrication of nickel micro gears by microelectroforming using PDMS molds
期刊论文
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica, 2019, 卷号: 49, 期号: 2, 页码: 182-188
作者:
Zhou, Bo
;
Wu, Youzhi
;
Su, Bo
;
Meng, Junhu
;
Han, Jiesheng
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2022/02/17
Electroforming
Fabrication
Gold deposits
Graphite
Lithography
Microchannels
Micromachining
Microstructure
Molds
Nickel
Nickel metallography
Polydimethylsiloxane
Pulse width modulation
Scanning electron microscopy
Deposited layer
Epitaxially grown
Graphite substrate
High quality
Micro gear
Microelectroforming
Polydimethylsiloxane PDMS
Soft lithography
Fabrication of metal microfluidic chip mold with coplanar auxiliary cathode in the electroforming process
期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2019, 卷号: 29
作者:
Zhao, Ming
;
Du, Liqun
;
Wei, Zhuangzhuang
;
Du, Chengquan
;
Liu, Xuqiang
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2019/12/02
metal microfluidic chip mold
thickness uniformity of micro electroforming
coplanar auxiliary cathode
computer-aided analysis
Quantitative study of mass transfer in megasonic micro electroforming based on mass transfer coefficient: Simulation and experimental validation
期刊论文
ELECTROCHIMICA ACTA, 2019, 卷号: 297, 页码: 328-333
作者:
Zhao, Ming
;
Du, Liqun
;
Du, Chengquan
;
Wei, Zhuangzhuang
;
Ji, Xuechao
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2019/12/02
Mass transfer coefficient
Megasonic micro electroforming
Simulated method
Sonoelectrochemical experiment
Fabrication of Ag-nanosheet-assembled hollow tubular array and their SERS effect.
期刊论文
Journal of Alloys & Compounds, 2019, 卷号: Vol.772, 页码: 663-668
作者:
Tian, Xingyou
;
Li, Guang
;
Chen, Lin
;
Wang, Hua
;
Wang, Jingjing
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/04/24
SURFACE
enhanced
Raman
effect
*TUBULAR
reactors
*ELECTROFORMING
*FABRICATION
*X-ray
diffraction
Numerical simulations and electrochemical experiments of the mass transfer of microvias electroforming under ultrasonic agitation
期刊论文
ULTRASONICS SONOCHEMISTRY, 2018, 卷号: 48, 页码: 424-431
作者:
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
Microvias electroforming
Ultrasonic
Simulation
Electrochemical experiments
Micro-column array structures
Reducing the residual stress in micro electroforming layer by megasonic agitation
期刊论文
ULTRASONICS SONOCHEMISTRY, 2018, 卷号: 49, 页码: 233-240
作者:
Song, Chang
;
Du, Liqun
;
Ji, Xuechao
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2019/12/02
Megasonic agitation
Micro electroforming
Residual stress
Dislocation density
Acoustic cavitation
Crystal orientation
Fabrication of microfluidic chip mold based on through-mask electrochemical etching and micro electroforming process
期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2018, 卷号: 28
作者:
Du, Liqun
;
Zhao, Wenjun
;
Zhai, Ke
;
Song, Chang
;
Li, Qingfeng
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
micro electroforming
adhesion strength
through
mask electrochemical etching
pickling
microfluidic chip mold
Usage of Janus green B for the improvement of the filling effect during replication process of nanoimprint nickel stamp
期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 页码: 24-26
作者:
Zhang, Ran
;
Zheng, Yongguang
;
Liu, Ze
;
Chu, Jinkui
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2019/12/02
nickel
nanolithography
filling
electrodeposition
electroforming
seals (stoppers)
Janus green B
filling effect
replication process
nanoimprint nickel stamp
void elimination
JGB molecules
high aspect ratio nanotrenches
nanoelectroforming process
electron density
metal deposition rate
sealing phenomenon
electrodeposition process
depth 200 nm
size 80 nm
Ni
Research of megasonic electroforming equipment based on the uniformity of electroforming process.
期刊论文
Ultrasonics sonochemistry, 2018, 卷号: 42, 页码: 368-375
作者:
Zhai Ke
;
Du Liqun
;
Wang Weitai
;
Zhu Heqing
;
Zhao Wenjun
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/02
Acoustic radiation,Electroforming,Half wave resonance,Megasonic,Uniformity
Numerical simulations and electrochemical experiments of the mass transfer of microvias electroforming under ultrasonic agitation
期刊论文
ULTRASONICS SONOCHEMISTRY, 2018, 卷号: Vol.48, 页码: 424-431
作者:
Ming Zhao
;
Liqun Du
;
Leijie Qi
;
Yuanqi Li
;
Yu Li
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/12/26
Microvias
electroforming
Ultrasonic
Simulation
Electrochemical
experiments
Micro-column
array
structures
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