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浏览/检索结果: 共1条，第1-1条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system (EI收录) 会议论文 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2014 - Conference Proceedings, Taipei, Taiwan, October 27, 2014 - October 31, 2014 作者:  Chen, H.[1];  Sun, W.J.[1];  Chen, A.I.H.[2];  Yeow, J.T.W.[2] 收藏  |  浏览/下载：2/0  |  提交时间：2019/04/12 Adaptive algorithms  Closed loop control systems  Computer programming languages  Electrodes  Field programmable gate arrays (FPGA)  Image acquisition  Laser applications  MEMS  Microelectromechanical devices  Microscopes  Scanning  Sliding mode control  Surface analysis