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科研机构
西安交通大学 [7]
内容类型
会议论文 [4]
期刊论文 [3]
发表日期
2018 [2]
2017 [4]
2016 [1]
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Research and progress of rapid polishing technology for large aperture optics
会议论文
作者:
Ban, Xinxing
;
Zhao, Huiying
;
Gu, Yawen
;
Xie, Ruiqing
;
Liao, Defeng
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2019/11/19
Large aperture optics
Low removal efficiencies
Polishing pads
Polishing slurries
Rapid remove
Surface controls
Ultra-precision machines
Ultraprecision machining
Improvement and application of pad conditioning accuracy in chemical mechanical polishing
期刊论文
Optical Engineering, 2018, 卷号: 57
作者:
Ban, Xinxing
;
Zhao, Huiying
;
Zhu, Xueliang
;
Zhao, Shijie
;
Xie, Ruiqing
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Application process
Chemical mechanical polishing(CMP)
Density distributions
Diamond conditioners
Kinematic Analysis
Optical processing
Planarity
Process parameters
Research of the Wavefront Detection Method based on the Scanning Pentaprism
会议论文
作者:
Zhu Xuelianga
;
Zhao Huiying
;
Dong Longchao
;
Tian Ailing
;
Yuan Daocheng
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
Collimated wavefront
Centroid algorithm
Pentaprism scanning
Optical testing
Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation
会议论文
作者:
Zhang, Chupeng
;
Zhao, Huiying
;
Gu, Yawen
;
Ban, Xinxing
;
Jiang, Chunye
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
Chemical mechanical polishing
Tin plate
Gas hydrostatic rotary table
Ultra-precision machine tool
Design principle
Diamond tool dressing
Kinematic errors
Gas hydrostatic linear guideway
High-precision self-adaptive phase-calibration method for wavelength-tuning interferometry
期刊论文
MEASUREMENT SCIENCE AND TECHNOLOGY, 2017, 卷号: 28
作者:
Zhu, Xueliang
;
Zhao, Huiying
;
Dong, Longchao
;
Wang, Hongjun
;
Liu, Bingcai
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/11/26
wavelength-tuning interferometry
optical measurement
phase calibration
Mechanism and experimental research on ultra-precision grinding of ferrite
会议论文
作者:
Ban Xinxing
;
Zhao Huiying
;
Dong Longchao
;
Zhu Xueliang
;
Zhang Chupeng
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2019/11/26
surface forming
ultra-precision grinding
ferrite
hard brittle material
Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect
期刊论文
SENSORS, 2016, 卷号: 16, 期号: [db:dc_citation_issue]
作者:
Ren, Dongxu
;
Zhao, Huiying
;
Zhang, Chupeng
;
Yuan, Daocheng
;
Xi, Jianpu
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/12/02
linear displacement sensor
multi-repeated method
average homogenization effect
projection lithography
linear scale
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