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The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
收藏  |  浏览/下载：0/0  |  提交时间：2019/09/17
超声强化液固传质动力学模型与硅中阶梯光栅湿法刻蚀技术研究 学位论文
博士: 中国科学院大学, 2014
焦庆斌
收藏  |  浏览/下载：56/0  |  提交时间：2014/08/21
消谱线弯曲长波红外成像光谱仪器的研究 学位论文
博士: 中国科学院大学, 2014
张晓龙
收藏  |  浏览/下载：116/0  |  提交时间：2014/08/21
An Infrared Absorption Gas Detection System Applying Plane Blazed Grating 会议论文
作者:  Wang, Hairong;  Cen, Di;  Men, Guangfei;  Wang, Jianyun
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/10
改善激光二极管阵列光束质量和光谱特性的关键技术研究 学位论文
博士: 中国科学院上海光学精密机械研究所, 2008
作者:  苏宙平
收藏  |  浏览/下载：92/0  |  提交时间：2016/11/28
Study on the fabrication of blazed grating with sub-micrometer space on aluminum film (EI CONFERENCE) 会议论文
12th International Manufacturing Conference in China, IMCC2006, September 21, 2006 - September 23, 2006, Xi'an, China
Lun S.; Hao D.; Qi X.
收藏  |  浏览/下载：12/0  |  提交时间：2013/03/25
The saw tooth grooves of blazed grating ruled by ruling engine are formed by diamond tool which presses on the aluminum film evaporated on the substrate of optical glass or metal. The real shape of ruled saw tooth groove is different from that of the ideal groove and the ruling process indicates that there are the zero order planes  similar to the flat tops  on the grating grooves. The results of Fourier analysis for the real ruled grating featuring the zero order plane structure shows that the flat top width is an important factor for grating efficiency. Additionally  bigger pressure value loaded on the diamond tool and bigger lateral pressure value on the aluminum film will be benefit to the improvement of grating diffraction efficiency. Based on the grating interferometer  the high precision positioning control system of ruling engine guarantees the accuracy of the grooves space. High density blazed grating whose space is 0.83p.m is manufactured and its' grooves spaces are very equidistant and uniform under the view field of AFM. And the infrared blazed grating  whose diffraction efficiency in the first order is up to 97 percent  is ruled successfully also.  
Rapidly tunable external cavity laser 专利
专利号: US6829258, 申请日期: 2004-12-07, 公开日期: 2004-12-07
作者:  CARLISLE, CLINTON B.;  TRISNADI, JAHJA I.
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/24
基于平面光栅尺的光刻机工件台位置测量技术研究 学位论文
作者:  郑亚忠
收藏  |  浏览/下载：316/0  |  提交时间：2018/12/26

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