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浏览/检索结果: 共3条，第1-3条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Design of an ultraprecision computerized numerical control chemical mechanical polishing machine and its implementation 期刊论文 OPTICAL ENGINEERING, 2018, 卷号: 57 作者:  Zhang, Chupeng;  Zhao, Huiying;  Zhu, Xueliang;  Zhao, Shijie;  Jiang, Chunye 收藏  |  浏览/下载：9/0  |  提交时间：2019/11/26 chemical mechanical polishing  design principle  diamond tool dressing  gas hydrostatic linear guideway  gas hydrostatic rotary table  kinematic errors  tin plate  ultraprecision machine tool   Effect of motion accuracy on material removal during the CMP process for large-aperture plane optics 期刊论文 INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 卷号: 94, 页码: 105-119 作者:  Zhang, C. P.;  Zhao, H. Y.;  Xie, R. Q.;  Zhao, Z. X.;  Gu, Y. W. 收藏  |  浏览/下载：3/0  |  提交时间：2019/11/26 Chemical mechanical polishing  Run-out error  Stitching measurement  Uneven removal  Polishing efficiency and accuracy  Gas hydrostatic rotary table  Large-aperture optics   Design of an ultra-precision CNC chemical mechanical polishing machine and its implementation 会议论文 作者:  Zhang, Chupeng;  Zhao, Huiying;  Gu, Yawen;  Ban, Xinxing;  Jiang, Chunye 收藏  |  浏览/下载：8/0  |  提交时间：2019/11/26 Chemical mechanical polishing  Tin plate  Gas hydrostatic rotary table  Ultra-precision machine tool  Design principle  Diamond tool dressing  Kinematic errors  Gas hydrostatic linear guideway