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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2012 [1]
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Experimental study on formability of bulk metallic glass as mold for microstructure replication (EI CONFERENCE)
会议论文
Mei L.
;
Liu J.
;
Huang Y.
;
Lin J.
;
Shen J.
;
Tan J.
;
Jin P.
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提交时间:2013/03/25
La62Al14Cu12Ni12BMG is introduced as a substitute for silicon which was widely used as mold material for nanofabrication. For the purpose of precise microstructure replication and complete filling
effects of various imprint parameters
including imprint temperature
imprint time and compression load
on formability of La 62Al14Cu12Ni12BMG are studied and discussed. Scanning electron microscope images and results of thermal analysis are used to characterize the filling effect of La62Al 14Cu12Ni12BMG. In particular
correlations between time and thermodynamic properties are presented. Despite of its high viscosity at crystallization temperature and its narrow supercooled liquid region
La62Al14Cu12Ni12BMG is proved to be a durable and promising material which can precisely replicate the patterns of silicon mold and then transfer its own patterns on Ce 69Al10Cu20Co1BMG and PMMA. 2012 Elsevier B.V. All rights reserved.
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