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浏览/检索结果: 共1条，第1-1条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of vertical coupled polymer microring resonator (EI CONFERENCE) 会议论文 ICO20: Optical Communication, August 21, 2005 - August 26, 2005, Changshun, China Deng W.; Shulin E.; Sun D.; Wang P.; Zhang D.; Xu W. 收藏  |  浏览/下载：14/0  |  提交时间：2013/03/25 In this paper  a new fabricating strategy for polymer microring resonators vertically coupled to a bus waveguide is developed. A carefully engineered Al masking process is utilized to compensate the local concave of the buried waveguide formed by polymer spin-coating  realizing perfectly flat top surface of the buried bus waveguide. A serial of the vertically coupled polymer microring resonator showing excellent topology was fabricated with this strategy. The resonance phenomenon is oberved in a PMMA-based microring resonators using this fabricating strategy. The suggested approach is suitable to fabricate vertically coupled polymer micro-resonators.