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CORC

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Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process 期刊论文
SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2018, 卷号: 61, 页码: 250-256
作者:  Wang QuanDai;  Cai XingXing;  Wang Li;  Li PengYang;  Xiao JiMing
收藏  |  浏览/下载：5/0  |  提交时间：2019/11/26
Experimental Study of the Ultrasonic Vibration-Assisted Abrasive Waterjet Micromachining the Quartz Glass 期刊论文
ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2018, 卷号: 2018
作者:  Hou, Rongguo;  Wang, Tao;  Lv, Zhe;  Liu, Yuanyong
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/11
Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process 期刊论文
2018, 卷号: 61, 页码: 250-256
作者:  Wang QuanDai;  Cai XingXing
收藏  |  浏览/下载：5/0  |  提交时间：2019/12/20
飞秒激光诱导微纳结构调控材料润湿性能 学位论文
博士: 中国科学院上海光学精密机械研究所, 2016
作者:  泮怀海
收藏  |  浏览/下载：207/0  |  提交时间：2016/11/28
Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:  Miao, J(苗静);  Shen, WJ(沈文江);  He, CD;  Xue, CY;  Xiong, JJ
收藏  |  浏览/下载：81/0  |  提交时间：2015/12/31
silicon  elemental semiconductors  silicon-on-insulator  wafer bonding  electromechanical effects  ultrasonic transducers  capacitive transducers  micromechanical devices  micromachining  vibrations  membranes  finite element analysis  reliability  capacitance  electromechanical coupling coefficient  capacitive micromachined ultrasonic transducer  impedance matching  propagation medium  microelectromechanical system capacitive ultrasonic transducer  silicon on insulator  wafer bonding  optimum geometric dimensions  membrane mechanical vibration  electrical characteristics  finite-element analysis  operation mode  device safety  device reliability  equivalent stress  operation-collapse voltage  bottom electrodes  glass substrate surface  parallel parasitic capacitance  Si  SiO2  
FABRICATION OF MICROFLUIDIC CHIPS BY AN ULTRASONIC MICROMACHINING WITH WET-ETCH SMOOTHING METHOD ON GLASS SUBSTRATES 会议论文
作者:  Liu, Keyin;  Zhao, Yulong;  Yang, Qing;  Li, Lei;  Fan, Xiaole
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/10
Prediction of tool wear in micro USM 期刊论文
CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2012, 卷号: 61, 页码: 227-230
作者:  Yu, Zuyuan;  Ma, Chunshi;  An, Chengming;  Li, Jianzhong;  Guo, Dongming
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/13
Kinematics of ultrasonic vibration milling and its influence on cutting force 期刊论文
Shenyang Gongye Daxue Xuebao/Journal of Shenyang University of Technology, 2012, 卷号: 34, 期号: 5, 页码: 530-535
作者:  Shen, Xue-Hui;  Zhang, Jian-Hua;  Xing, Dong-Liang
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/23
用于高频超声换能器的以硅片为基底的PMNT单晶厚膜 期刊论文
Appl Phys A, 2010, 期号: 98, 页码: 233-237
Peng J; Lau ST; Chao C; Dai JY; Chan HLW; 罗豪甦; Zhu BP; Zhou QF; Shung KK
收藏  |  浏览/下载：16/0  |  提交时间：2012/07/05
Piezoelectrically actuated array microjet for biomedical purpose 期刊论文
2010, 2010
Xu Qiang; Zhou Zhaoying; Zhu Junhua; Feng Yanying; Lin Dong; Du Guibin
收藏  |  浏览/下载：3/0

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