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The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
收藏  |  浏览/下载:0/0  |  提交时间:2019/09/17
超声强化液固传质动力学模型与硅中阶梯光栅湿法刻蚀技术研究 学位论文
博士: 中国科学院大学, 2014
焦庆斌
收藏  |  浏览/下载:56/0  |  提交时间:2014/08/21
Silicon-on-insulator based miniature integrated spectrometer using echelle diffraction grating 期刊论文
2011 Asia Communications and Photonics Conference and Exhibition (ACP 2011), 2011
作者:  Li Qin;  Lei Wang;  Ming-Yu Li;  Jian-Jun He
收藏  |  浏览/下载:2/0  |  提交时间:2020/01/05


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