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Experimental investigation of standing wave effect in dual-frequency capacitively coupled argon discharges: role of a low-frequency source 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 卷号: 27
作者:  Zhao, Kai;  Liu, Yong-Xin;  Kawamura, E.;  Wen, De-Qi;  Lieberman, M. A.
收藏  |  浏览/下载:12/0  |  提交时间:2019/12/02
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 卷号: 26
作者:  Liu, Yong-Xin;  Korolov, Ihor;  Schuengel, Edmund;  Wang, You-Nian;  Donko, Zoltan
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/02


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