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沈阳自动化研究所 [8]
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Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control
期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2023, 卷号: 31, 期号: 18, 页码: 2675-2686
作者:
Y. Chen, L. Lai, P. Li and L. Zhu
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2024/07/01
Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform
期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2021, 卷号: 29, 期号: 9, 页码: 2149-2157
作者:
X. Zhang
;
L.-J. Lai
;
P.-Z. Li and L.-M. Zhu
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2022/06/13
On the Disturbance Rejection of a Piezoelectric Driven Nanopositioning System
期刊论文
IEEE ACCESS, 2020, 卷号: 8, 页码: 74771-74781
作者:
Wei, Wei
;
Xia, Pengfei
;
Xue, Wenchao
;
Zuo, Min
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  |  
浏览/下载:34/0
  |  
提交时间:2020/06/30
Nanopositioning
Hysteresis
Bandwidth
Robust control
Uncertainty
Estimation error
Nanopositioning
active disturbance rejection control
time-varying extended state observer
variable bandwidth control
noise attenuation
Real-Time Correction and Stabilization of Laser Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano Positioning Stage Metrology
期刊论文
Sensors (Basel, Switzerland), 2019, 卷号: 19
作者:
Cai Yindi
;
Feng Baokai
;
Sang Qi
;
Fan Kuang-Chao
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
homodyne interferometer,laser diode,positioning stage,wavelength correction,wavelength stabilization
Control and Data Acquisition System for Hard X-Ray Micro-Beam Grazing Incident Experiment and Its Application
期刊论文
SPECTROSCOPY AND SPECTRAL ANALYSIS, 2019, 卷号: 39, 期号: 9, 页码: 2794-2799
作者:
Lan, XY
;
He, SM
;
Zheng, Y
;
Li, AG
;
Wang, J
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2020/10/16
Design and Assessment of a 6-DOF Micro/Nanopositioning System
期刊论文
Ieee-Asme Transactions on Mechatronics, 2019, 卷号: 24, 期号: 5, 页码: 2097-2107
作者:
D.F.Zhang
;
P.Z.Li
;
J.G.Zhang
;
H.N.Chen
;
K.Guo
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2020/08/24
Fasteners,Solid modeling,Optics,Physics,Actuators,Manufacturing,processes,End effectors,Flexure mechanisms,mechanical design,micro,nanopositioning,parallel positioning system,six degree-of-freedom,(6-DOF),purpose positioner-fixture,parallel manipulator,stage,mechanism,2-dof,3-dof,Automation & Control Systems,Engineering
Kinematic characteristic analysis of a micro-/nano positioning stage based on bridge-type amplifier
期刊论文
2018, 卷号: 271, 页码: 230-242
作者:
Lin, Chao[1]
;
Shen, Zhonglei[1]
;
Wu, Zhaohui[1]
;
Yu, Jiang[1]
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/28
Hysteresis modelling and feedforward compensation of piezoelectric nanopositioning stage with a modified Bouc-Wen model
期刊论文
MICRO & NANO LETTERS, 2018, 卷号: 13, 期号: 8
作者:
Ming, Min
;
Feng, Zhao
;
Ling, Jie
;
Xiao, Xiao-Hui
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2019/12/05
control nonlinearities
particle swarm optimisation
feedforward
position control
compensation
hysteresis
vibration control
nanopositioning
piezoelectric actuators
(MBW) model
polynomial function
PEA
particle swarm optimisation algorithm
MBW model
input-output
corresponding identification parameters
experimental data
0
31% relative error
feedforward compensator
positioning accuracy
feedforward compensation
piezoelectric nanopositioning stage
modified Bouc
piezoelectric actuators
nanopositioning equipment
strong hysteresis nonlinearity
Efficient block matching using improved particle swarm optimization with application to displacement measurement for nano motion systems
期刊论文
OPTICS AND LASERS IN ENGINEERING, 2018, 卷号: 111, 页码: 246-254
作者:
Lu, Guoliang
;
Zhu, Yongbo
;
Su, Gaozhao
;
Zhang, Zhiming
;
Yan, Peng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/11
Displacement measurement
Nano-positioning stage
Micro vision
Block
matching
Particle swarm optimization
Efficient block matching using improved particle swarm optimization with application to displacement measurement for nano motion systems
期刊论文
OPTICS AND LASERS IN ENGINEERING, 2018, 卷号: Vol.111, 页码: 246-254
作者:
Lu, Guoliang
;
Zhu, Yongbo
;
Su, Gaozhao
;
Zhang, Zhiming
;
Yan, Peng
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/26
Displacement
measurement
Nano-positioning
stage
Micro
vision
Block
matching
Particle
swarm
optimization
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