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Evaluation of wavefront aberrations induced by overlay errors in stitching computer-generated holograms 期刊论文
Optics and Lasers in Engineering, 2022, 卷号: 152, 页码: 10
作者:  Y. Y. Bai;  Z. Y. Zhang;  T. B. Chen;  R. Q. Wang;  H. D. Wei
收藏  |  浏览/下载:2/0  |  提交时间:2023/06/14
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
收藏  |  浏览/下载:0/0  |  提交时间:2023/06/14
Optical design of compact unobscured ground-based diffractive telescope 期刊论文
Optik, 2020, 卷号: 205
作者:  He, Chuanwang;  Huang, Peng;  Dong, Xiaochun;  Fan, Bin
收藏  |  浏览/下载:14/0  |  提交时间:2021/05/11
Large range nano alignment for proximity lithography using complex grating 期刊论文
Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106
作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin
收藏  |  浏览/下载:8/0  |  提交时间:2021/05/06
Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文
Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355
作者:  Y.Song;  Bayanheshig;  S.Li;  S.Jiang;  W.Wang
收藏  |  浏览/下载:0/0  |  提交时间:2020/08/24
Design and Assessment of a 6-DOF Micro/Nanopositioning System 期刊论文
Ieee-Asme Transactions on Mechatronics, 2019, 卷号: 24, 期号: 5, 页码: 2097-2107
作者:  D.F.Zhang;  P.Z.Li;  J.G.Zhang;  H.N.Chen;  K.Guo
收藏  |  浏览/下载:7/0  |  提交时间:2020/08/24
Fabrication of Sub-Micrometer-Sized MoS2 Thin-Film Transistor by Phase Mode AFM Lithography 期刊论文
Small, 2018, 卷号: 14, 期号: 49, 页码: 1-6
作者:  Yu P(于鹏);  Li GY(李广勇);  Li M(李萌);  Shi JL(施佳林);  Liu LQ(刘连庆)
收藏  |  浏览/下载:34/0  |  提交时间:2018/10/08
Orienting Thin Films of Lamellar Block Copolymer: The Combined Effect of Mobile Ions and Electric Field 期刊论文
MACROMOLECULES, 2018, 卷号: 51, 期号: 19, 页码: 7881-7892
作者:  Schick, M;  Man, XK;  Zheng, B;  Andelman, D;  Ou-Yang, ZC
收藏  |  浏览/下载:26/0  |  提交时间:2018/12/27
Alignment Method for Linear-Scale Projection Lithography Based on CCD Image Analysis 期刊论文
SENSORS, 2018, 卷号: 18
作者:  Ren, Dongxu;  Zhao, Zexiang;  Xi, Jianpu;  Li, Bin;  Li, Zhengfeng
收藏  |  浏览/下载:4/0  |  提交时间:2019/11/19
Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 19, 页码: 25381-25398
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wu, N.
收藏  |  浏览/下载:4/0  |  提交时间:2019/09/17


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