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Surface quality evaluation of single crystal 4H-SiC wafer machined by hybrid laser-waterjet: Comparing with laser machining
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 卷号: 93, 页码: 238-251
作者:
Feng, Shaochuan
;
Huang, Chuanzhen
;
Wang, Jun
;
Jia, Zhixin
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2019/12/11
Single crystal 4H-SiC
Surface quality
Hybrid laser-waterjet
micromachining
Heat-affected zone (HAZ)
Recast layer
Oxidation
behavior
Graphene-assisted multilayer structure employing hybrid surface plasmon and magnetic plasmon for surface-enhanced vibrational spectroscopy
期刊论文
Optics Express, 2018, 卷号: 26, 期号: 13, 页码: 16903-16916
作者:
Wei, Wei
;
Chen, Na
;
Nong, Jinpeng
;
Lan, Guilian
;
Wang, Wei
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2019/06/26
A study of hybrid laser-waterjet micromachining of crystalline germanium
期刊论文
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE, 2018, 卷号: 232, 期号: 11, 页码: 1903-1917
作者:
Zhu, Hao
;
Wang, Jun
;
Yao, Peng
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/11
Germanium
micro-grooving
laser-assisted waterjet machining
hybrid
laser-waterjet
laser
waterjet
Material removal of single crystal 4H-SiC wafers in hybrid laser-waterjet micromachining process
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2018, 卷号: 82, 页码: 112-125
作者:
Feng, Shaochuan
;
Huang, Chuanzhen
;
Wang, Jun
;
Zhu, Hongtao
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/11
Hybrid micromachining
Laser
Waterjet
Material removal
Finite
difference method (FDM)
Heat transfer and material ablation in hybrid laser-waterjet microgrooving of single crystalline germanium
期刊论文
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2017, 卷号: 116, 页码: 25-39
作者:
Zhu, Hao
;
Wang, Jun
;
Yao, Peng
;
Huang, Chuanzhen
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/12
Laser ablation
Micromachining
Hybrid laser-waterjet
Germanium
Heat
transfer
Plasma
Investigation and modelling of hybrid laser-waterjet micromachining of single crystal SiC wafers using response surface methodology
期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017, 卷号: 68, 页码: 199-212
作者:
Feng, Shaochuan
;
Huang, Chuanzhen
;
Wang, Jun
;
Zhu, Hongtao
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/12/12
Hybrid micromachining
Laser
Waterjet
Interactive effect
Prediction
model
Response surface methodology (RSM)
Hybrid waveguiding structure in LiTaO3 crystal fabricated by direct femtosecond laser writing
期刊论文
OPTICAL MATERIALS, 2016, 卷号: 51, 页码: 190-193
作者:
Cheng, Chen
;
Jia, Yuechen
;
Vazquez de Aldana, Javier R.
;
Tan, Yang
;
Chen, Feng
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  |  
浏览/下载:8/0
  |  
提交时间:2019/12/16
Optical waveguides
Femtosecond laser micromachining
Lithium tantalate
crystal
Polarization-selective devices
Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass
期刊论文
lab chip, 2014, 卷号: 14, 期号: 18, 页码: 3447
作者:
Sugioka, Koji
;
Xu, Jian
;
Wu, Dong
;
Hanada, Yasutaka
;
Wang, Zhongke
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2016/11/28
ON-A-CHIP
PHOTOSENSITIVE GLASS
TRANSPARENT MATERIALS
3-DIMENSIONAL MICROFABRICATION
PHOTOSTRUCTURABLE GLASS
SELECTIVE METALLIZATION
LAB
INTEGRATION
ABLATION
CHANNEL
Femtosecond laser 3D micromachining: a powerful tool for the fabrication of microfluidic, optofluidic, and electrofluidic devices based on glass
期刊论文
lab chip, 2014, 卷号: 14, 期号: 18, 页码: 3447
作者:
Sugioka, Koji
;
Xu, Jian
;
Wu, Dong
;
Hanada, Yasutaka
;
Wang, Zhongke
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2016/11/28
ON-A-CHIP
PHOTOSENSITIVE GLASS
TRANSPARENT MATERIALS
3-DIMENSIONAL MICROFABRICATION
PHOTOSTRUCTURABLE GLASS
SELECTIVE METALLIZATION
LAB
INTEGRATION
ABLATION
CHANNEL
Heating and material removal process in hybrid laser-waterjet ablation of silicon substrates
期刊论文
International Journal of Machine Tools & Manufacture: Design, research and application, 2014, 页码: 1-16
作者:
V. Tangwarodomnukun
;
J. Wang
;
C. Z. Huang
;
H. T. Zhu
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/17
Modeling
Hybrid process
Micromachining
Laser
Waterjet
Silicon wafer
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