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科研机构
上海大学 [33]
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期刊论文 [28]
会议论文 [5]
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2019 [4]
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专题:上海大学
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Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO₂ Super-Lattice
期刊论文
Nanomaterials (Basel, Switzerland), 2019, 卷号: 9, 页码: 1-13
作者:
Ma Hong-Ping[1]
;
Yang Jia-He[2]
;
Yang Jian-Guo[3]
;
Zhu Li-Yuan[4]
;
Huang Wei[5]
收藏
  |  
浏览/下载:37/0
  |  
提交时间:2019/04/22
SiO2
SiOx
plasma-enhanced atomic layer deposition (PEALD)
stoichiometry
superlattice
Chemical Vapor Deposition of Vertically Aligned Carbon Nanotube Arrays: Critical Effects of Oxide Buffer Layers
期刊论文
Nanoscale research letters, 2019, 卷号: 14, 页码: 106
作者:
Li Haohao[1]
;
Yuan Guangjie[2]
;
Shan Bo[3]
;
Zhang Xiaoxin[4]
;
Ma Hongping[5]
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2019/04/22
Atomic layer deposition
Chemical vapor deposition
Oxide buffer layers
Vertically aligned carbon nanotubes
Enhanced Stability in Zr-Doped ZnO TFTs With Minor Influence on Mobility by Atomic Layer Deposition
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 卷号: 66, 页码: 1760-1765
作者:
Yang, Jun[1]
;
Zhang, Yongpeng[2]
;
Qin, Cunping[3]
;
Ding, Xingwei[4]
;
Zhang, Jianhua[5]
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/04/22
Atomic layer deposition (ALD)
oxygen defects
temperature stability
Zr-doped ZnO (ZrZnO) thin-film transistors (TFTs)
Atomic layer deposition of buffer layers for the growth of vertically aligned carbon nanotube arrays
期刊论文
Nanoscale Research Letters, 2019, 卷号: 14, 页码: 119
作者:
Haohao Li[1]
;
Guangjie Yuan[2]
;
Bo Shan[3]
;
Xiaoxin Zhang[4]
;
Hongping Ma[5]
收藏
  |  
浏览/下载:30/0
  |  
提交时间:2019/04/22
Atomic layer deposition
Oxide buffer layers
Thermal interface materials
Vertically aligned carbon nanotube arrays
High-quality lead sulfide nanofilm deposited on silica fiber substrate by atomic layer deposition technology
会议论文
NANOPHOTONICS AND MICRO/NANO OPTICS IV, 2018-01-01
作者:
Pan, Xiangping[1]
;
Dong, Yanhua[2]
;
Wen, Jianxiang[3]
;
Zheng, Jiajia[4]
;
Su, Caiyun[5]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/22
Lead sulfide
nanofilm
atomic layer deposition
optical properties
Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition
期刊论文
NANOMATERIALS, 2018, 卷号: 8, 页码: 1-14
作者:
Ma, Hong-Ping[1]
;
Lu, Hong-Liang[2]
;
Yang, Jia-He[3]
;
Li, Xiao-Xi[4]
;
Wang, Tao[5]
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/04/22
silicon nitride
silicon oxynitride
plasma enhanced atomic layer deposition
oxygen contamination
optical properties
Zr2N2O Coating-Improved Corrosion Resistance for the Anodic Dissolution Induced by Cathodic Transient Potential
期刊论文
ACS APPLIED MATERIALS & INTERFACES, 2018, 卷号: 10, 页码: 40111-40124
作者:
Wang, Xian-Zong[1]
;
Luo, Hong[2]
;
Muneshwar, Triratna[3]
;
Fan, Hong-Qiang[4]
;
Cadien, Ken[5]
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2019/04/22
cathode transient potential
metal bipolar plates
polymer electrolyte membrane fuel cell
transpassive dissolution
zirconium oxynitride coating
plasma-enhanced atomic layer deposition
Atomic Layer Deposited ZrxAl1-xOy Film as High Gate Insulator for High Performance ZnSnO Thin Film Transistor
期刊论文
ELECTRONIC MATERIALS LETTERS, 2018, 卷号: 14, 页码: 669-677
作者:
Li, Jun[1]
;
Zhou, You-Hang[2]
;
Zhong, De-Yao[3]
;
Huang, Chuan-Xin[4]
;
Huang, Jian[5]
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/04/22
Atomic layer deposition
ZrxAl1-xOy thin films
ZTO TFTs
NBIS stability
TS stability
Nitrogen-Doped ZnO Film Fabricated Via Rapid Low-Temperature Atomic Layer Deposition for High-Performance ZnON Transistors
期刊论文
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2018, 卷号: 65, 页码: 3283-3290
作者:
Ding, Xingwei[1]
;
Yang, Jun[2]
;
Qin, Cunping[3]
;
Yang, Xuyong[4]
;
Ding, Tao[5]
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/04/22
Atomic layer deposition
density of states (DOS)
oxygen defects
nitrogen-doped ZnO (ZnON) thin-film transistors (TFTs)
Achieving ultrahigh corrosion resistance and conductive zirconium oxynitride coating on metal bipolar plates by plasma enhanced atomic layer deposition
期刊论文
JOURNAL OF POWER SOURCES, 2018, 卷号: 397, 页码: 32-36
作者:
Wang, Xian-Zong[1]
;
Muneshwar, Triratna P.[2]
;
Fan, Hong-Qiang[3]
;
Cadien, Ken[4]
;
Luo, Jing-Li[5]
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/04/22
Zirconium oxynitride
Conductive coating
Corrosion resistance
Metal bipolar plates
Atomic layer deposition
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