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Effect of rapid thermal processing on copper precipitation in p/p(+) silicon epitaxial wafers with heavily boron-doped substrates 期刊论文
http://dx.doi.org/10.1063/1.4862179, 2014
Xu, Jin; Ji, Chuan; Zhang, Guangchao; 徐进
收藏  |  浏览/下载:4/0  |  提交时间:2015/07/22
Effect of copper precipitation on the formation of denuded zone in Czchralski silicon 期刊论文
2012
Wang Yong-Zhi; Xu Jin; Wang Na-Ting; Ji Chuan; Zhang Guang-Chao; 徐进
收藏  |  浏览/下载:4/0  |  提交时间:2013/12/12
Influence of nickel precipitation on the formation of denuded zone in Czochralski silicon 期刊论文
http://dx.doi.org/10.1016/j.jallcom.2010.04.164, 2010
Xu, J.; Wang, Y. Z.; Yang, D. R.; Moeller, H. J.; 徐进
收藏  |  浏览/下载:7/0  |  提交时间:2013/12/12
Influence of copper precipitation on the formation of denuded zone in Czochralski silicon 期刊论文
http://dx.doi.org/10.1063/1.2821311, 2007
Xu, J.; Yang, D.; Moeller, H. J.; 徐进
收藏  |  浏览/下载:5/0  |  提交时间:2013/12/12


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