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西安交通大学 [1]
大连理工大学 [1]
长春光学精密机械与物... [1]
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Design Of A Novel Electrothermal Actuator for Integrated MEMS Safety-and-Arming Devices
会议论文
作者:
Li, Xiuyuan
;
Zhao, Yulong
;
Hu, Tengjiang
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浏览/下载:2/0
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提交时间:2019/12/02
actuator
safety-and-arming device
mems
electrothermal
The Fabrication of Trans-scale Micro-fuze Safety Device
会议论文
15th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT) / 4th International Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT), Tianjin, PEOPLES R CHINA, 2013-11-03
作者:
Du Liqun
;
Wang Aoan
;
Zhao Ming
;
Song Mancang
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浏览/下载:8/0
  |  
提交时间:2019/12/09
Metal micro-structure
UV-LIGA
Wire-cut Electrical Discharge Machining (WEDM)
Micro-fuze safety device
Trans-scale fabrication
Integrated mach-zehnder micro-interferometer for gas trace remote sensing (EI CONFERENCE)
会议论文
ICO20: Remote Sensing and Infrared Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China
Chiarini M.
;
Bentini G. G.
;
Bianconi M.
;
Cerutti A.
;
Pennestri G.
;
Wang P.
;
She L.
;
Mazzoldi P.
;
Sada C.
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提交时间:2013/03/25
The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides: the phase shift between the two optical paths has been obtained
1mm 2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4m-1.1m) will be presented. The performance of the device
without moving parts
evaluated on standard radiation sources
by applying a suitable electric field. The whole device is 60mm long
demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications
has a 0.57times
spanning from Space Technology
Earth observation for Environment monitoring
to Safety and Security applications.
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