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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2006 [1]
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发表日期:2006
专题:长春光学精密机械与物理研究所
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Study on the fabrication of orange micro-LED arrays for display (EI CONFERENCE)
会议论文
ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China
Jin X.
;
Liang J.
;
Li J.
;
Zhao L.
;
Wang W.
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提交时间:2013/03/25
Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays
we employ a matrix addressable architecture
in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electric isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGalnP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic etchant. The pixel size is about 16um 20um
and there are 1000 818 pixels in the light emitting chip whose diagonal is 1-in.
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