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Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2023, 卷号: 31, 期号: 18, 页码: 2675-2686
作者:  Y. Chen, L. Lai, P. Li and L. Zhu
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