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Atomic-layer-deposited (ALD) Al2O3 passivation dependent interface chemistry, band alignment and electrical properties of HfYO/Si gate stacks 期刊论文
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2019, 卷号: 35, 期号: 5, 页码: 769-776
作者:  Liang, Shuang[1];  He, Gang[2];  Wang, Die[3];  Qiao, Fen[4]
收藏  |  浏览/下载:52/0  |  提交时间:2019/12/24


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