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CORC

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Hybrid simulation of electron energy distributions and plasma characteristics in pulsed RF CCP sustained in Ar and SiH4/Ar discharges 期刊论文
PHYSICS OF PLASMAS, 2017, 卷号: 24, 页码: -
作者:  Wang, Xi-Feng;  Jia, Wen-Zhu;  Song, Yuan-Hong;  Zhang, Ying-Ying;  Dai, Zhong-Ling
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/03
Effect of reactant transport on the trench profile evolution for silicon etching in chlorine plasmas 期刊论文
VACUUM, 2014, 卷号: 99, 页码: 180-188
作者:  Zhang, Sai-Qian;  Dai, Zhong-Ling;  Song, Yuan-Hong;  Wang, You-Nian
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/09
Study on feature profile evolution for chlorine etching of silicon in an RF biased sheath 期刊论文
17th International Conference on Surface Modification of Materials by Ion Beams (SMMIB), 2013, 卷号: 89, 页码: 197-202
作者:  Dai, Zhong-Ling;  Zhang, Sai-Qian;  Wang, You-Nian
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/11
Effects of reactor geometry and frequency coupling on dual-frequency capacitively coupled plasmas 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2013, 卷号: 22, 页码: -
作者:  Bi, Zhen-Hua;  Dai, Zhong-Ling;  Zhang, Yu-Ru;  Liu, Dong-Ping;  Wang, You-Nian
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/11
Nonlinear Plasma Dynamics in Electron Heating of Asymmetric Capacitive Discharges with a Fluid Sheath Model 期刊论文
CHINESE PHYSICS LETTERS, 2011, 卷号: 28, 页码: -
作者:  Dai Zhong-Ling;  Wang You-Nian
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/18
Study on mechanism of etching in low pressure radio-frequency plasmas 期刊论文
Joint Meeting of the 10th Asia-Pacific Conference on Plasma Science and Technology (APCPST 2010)/153rd Symposium on Plasma Science for Materials (SPSM 2010), 2011, 卷号: 11, 页码: S121-S125
作者:  Dai, Zhong-Ling;  Yue, Guang;  Wang, You-Nian
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/18
Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure 期刊论文
CHINESE PHYSICS LETTERS, 2009, 卷号: 26, 页码: -
作者:  Hao Mei-Lan;  Dai Zhong-Ling;  Wang You-Nian
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/24
Numerical results for the Ar and CF(4) mixture gas in a dual frequency capacitively coupled plasma using a hybrid model 期刊论文
PHYSICS OF PLASMAS, 2009, 卷号: 16
作者:  Bi, Zhen-Hua;  Dai, Zhong-Ling;  Xu, Xiang;  Li, Zhi-Cheng;  Wang, You-Nian
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/24
Dust particle properties in a dual-frequency driven sheath 期刊论文
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 页码: 1372-1375
作者:  Liu, Yu;  Dai, Zhong-Ling;  Wang, You-Nian
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/27
Comparison between dual radio frequency- and pulse-driven sheath near insulating substrates 期刊论文
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 页码: 632-635
作者:  Dai Zhong-Ling;  Liu Chuan-Sheng;  Wang You-Nian
收藏  |  浏览/下载：12/0  |  提交时间：2019/12/27

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