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浏览/检索结果: 共9条，第1-9条 帮助 限定条件 专题：北京大学    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 MORPHOLOGY CONTROL OF MICROCHANNEL CROSS-SECTION USING SACRIFICIAL SPINNING FIBER 其他 2017-01-01 Zhang, Yangxi; Jing, Huize; Xu, Kaisi; Gao, Chencheng; Hao, Yilong; Meng, Fanrui; Gui, Yiming; Chen, Guoxing 收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03 FABRICATION  PDMS   A LOW-COST FLEXIBLE ELECTROCHEMICAL ACCELEROMETER USING GRAPHENE-INTEGRATED MICROCHANNEL 其他 2017-01-01 Zhang, Yangxi; Li, Ze; Xu, Kaisi; Gao, Chencheng; Hao, Yilong; Meng, Fanrui; Gui, Yiming 收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03 Graphene water transfer printing for 3D surface 其他 2016-01-01 Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Li, Linyu; Gao, Chencheng; Zhu, Hongwei; Hao, Yilong 收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03 GRAPHENE WATER TRANSFER PRINTING FOR 3D SURFACE 其他 2016-01-01 Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Li, Linyu; Gao, Chencheng; Zhu, Hongwei; Hao, Yilong 收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03 FILMS   Design and Simulation of Corrugated Diaphragm Applied to the MEMS Fiber Optic Pressure Sensor 其他 2016-01-01 Gui, Yiming; Zhang, Yangxi; Liu, Guandong; Hao, Yilong; Gao, Chengchen 收藏  |  浏览/下载：6/0  |  提交时间：2017/12/03 MEMS  corrugated diaphragm  sensitivity  FABRICATION   Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection 其他 2016-01-01 Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Gao, Chengchen; Hao, Yilong 收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03 graphene  capacitive sensor  ultra-low pressure   Fabrication of laterally driven bulk titanium devices on titanium-on-glass wafers 期刊论文 journal of micromechanics and microengineering, 2013 Zhang, Yiming; Li, Nannan; Yan, Bo; Feng, Xiaoyang; Hu, Jia; He, Shuwei; Hao, Yilong; Chen, Jing 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10 MEMS APPLICATIONS  SILICON  SOI   Chemical-Mechanical Polishing of Bulk Tungsten Substrate 其他 2013-01-01 Luo, Jin; Zhang, Yiming; Song, Lu; Chen, Shuhui; Bian, Yuan; Li, Tianyu; Hao, Yilong; Chen, Jing 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/16 CMP  tungsten  average surface roughness  the platen rotational speed   Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap 期刊论文 微电子工程, 2012 Zhang, Yiming; Wang, Yunda; Cai, Ming; Wang, Ying; Hao, Yilong; Chen, Jing 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10 MEMS  Polysilicon corrosion  HF release  Parylene  POROUS SILICON FORMATION  GALVANIC CORROSION  MEMS