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High-speed near-field photolithography at 16.85 nm linewidth with linearly polarized illumination 期刊论文
OPTICS EXPRESS, 2017, 卷号: 25, 期号: 15, 页码: 17571-17580
作者:  Ji, Jiaxin;  Meng, Yonggang;  Hu, Yueqiang;  Xu, Jian;  Li, Shayu
收藏  |  浏览/下载:21/0  |  提交时间:2018/05/25


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