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Surface etching mechanism of carbon-doped ge2sb2te5 phase change material in fluorocarbon plasma 期刊论文
Applied physics a-materials science & processing, 2016, 卷号: 122, 期号: 9, 页码: 6
作者:  Shen, Lanlan;  Song, Sannian;  Song, Zhitang;  Li, Le;  Guo, Tianqi
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