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Investigation of deposition parameter effects on energy bandgap of silicon thin film prepared by plasma enhanced chemical vapor deposition via factorial experiment 会议论文
2012 2nd International Conference on Advanced Material Research, ICAMR 2012, 2012-01-07
作者:  Zhao, Lei[1];  Zhao, Bending[2];  Yan, Baojun[3];  Diao, Hongwei[4];  Wang, Wenjing[5]
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/23
Factorial experiment study on deposition parameter dependence of the energy bandgap of a-SiGe:H thin film prepared by plasma enhanced chemical vapor deposition 会议论文
2011 International Conference on Advanced Materials and Engineering Materials, ICAMEM2011, 2011-11-22
作者:  Zhao, Lei[1];  Yan, Baojun[2];  Zhao, Bending[3];  Diao, Hongwei[4];  Wang, Wenjing[5]
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/23


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