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Characterization of the transition from the to mode on hydrogen dilution at atmospheric pressure argon silane plasma in a RF discharge 会议论文
The 10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
作者:  Zhuang J(庄娟);  Wang DZ(王德真)
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/24


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