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科研机构
西安交通大学 [13]
内容类型
期刊论文 [9]
会议论文 [4]
发表日期
2019 [1]
2017 [2]
2015 [2]
2014 [3]
2012 [1]
2011 [1]
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专题:西安交通大学
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Wafer-level fabrication of low power consumption integrated alcohol microsensor
期刊论文
MICRO & NANO LETTERS, 2019, 卷号: 14, 页码: 11-16
作者:
Wang, Hairong
;
Wang, Mengya
;
Lei, Weitao
;
Chen, Xiaowei
;
Huang, Hao
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2019/11/19
nanocomposites
electrodes
membranes
alcohol detection
sputter deposition
organic compounds
suspensions
gas sensors
temperature sensors
power 39
microsensors
microelectromechanical systems micromachining technology
wafer-level sensor chips
electrochemical electrodes
micromachining
TiO2-SnO2
magnetron sputtering
temperature measurement
power consumption
suspended membrane
power measurement
0 mW
nanosensors
titanium compounds
low power consumption integrated alcohol microgas sensor
microheater
wafer-level fabrication
tin compounds
Surface ablation and threshold determination of AlCu4SiMg aluminum alloy in picosecond pulsed laser micromachining
期刊论文
OPTICS AND LASER TECHNOLOGY, 2017, 卷号: 94, 页码: 267-278
作者:
Zheng, Buxiang
;
Jiang, Gedong
;
Wang, Wenjun
;
Mei, Xuesong
;
Wang, Fangcheng
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Ablation area
Aluminum alloy
Picosecond pulsed laser
Micromachining
Ablation threshold
Ablation characteristics
Improving the efficiency of the collector of space traveling wave tube with micromachining technology
期刊论文
Zhongguo Kongjian Kexue Jishu/Chinese Space Science and Technology, 2017, 卷号: 37, 页码: 61-65
作者:
Bai, Chunjiang
;
Cui, Wanzhao
;
Ye, Ming
;
He, Yongning
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/11/26
Chemical etching
Collector
Oxygen-free high thermal conductivity copper
Secondary electron yield
Space traveling wave tube
Optical micro-electro-mechanical-system pressure sensor based on light intensity modulation
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: [db:dc_citation_issue], 页码: 491-495
作者:
Zhao, Yulong
;
Li, Cun
;
Hao, Mengmeng
;
Cheng, Rongjun
;
Fan, Xiaole
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
thin film
finite element method
flammable areas
fibre conducts
light intensity modulation
silicon compounds
microsensors
bulk micromachining technology
optical microelectromechanical-system pressure sensor
combustible areas
optical cables
intensity modulation
pressure sensors
silicon diaphragm deformation
micromachining
pressure measurement
finite element analysis
optical cable
reflected light intensity shift
pressure 0 MPa to 20 MPa
signal transmission
photoelectric detection circuit
micro-optomechanical devices
elemental semiconductors
optical modulation
thin films
source light
silicon
fibre optic sensors
Microtexture fabrication on cylindrical metallic surfaces and its application to a rotor-bearing system
期刊论文
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 卷号: 78, 期号: [db:dc_citation_issue], 页码: 1021-1029
作者:
Hao, Xiuqing
;
Pei, Shiyuan
;
Wang, Li
;
Xu, Hua
;
He, Ning
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
Surface texturing
Cylindrical surface
Vibration reduction
Electrochemical micromachining (EMM)
Radial sliding bearing
Feasibility Study of a Pressure Sensor Based on Double-Ended Tuning Fork Quartz Resonator
会议论文
作者:
Cheng, Rongjun
;
Zhao, Yulong
;
Li, Cun
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
resonant
quartz resonator
pressure sensor
micromachining technology
Packaging a piezoresistive pressure sensor for intracranial pressure monitoring
会议论文
作者:
Meng, Xiawei
;
Zhao, Yulong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
Biomedical applications
Implantable sensors
Intra-cranial pressure
Miniaturization
Piezo-resistive
Piezoresistive pressure sensors
Silicon bulk micromachining technology
Single-crystal silicon wafers
Improving the efficiency of picosecond laser micromachining of stainless steel
期刊论文
RADIATION EFFECTS AND DEFECTS IN SOLIDS-INCORPORATING PLASMA SCIENCE AND PLASMA TECHNOLOGY, 2014, 卷号: 169, 期号: [db:dc_citation_issue], 页码: 102-108
作者:
Zhao, W. Q.
;
Wang, W. J.
;
Jiang, G. D.
;
Mei, X. S.
;
Liu, B.
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
efficiency
ablation
stainless steel
picosecond laser
Fabrication qualities of micro-gratings encoding dependence on laser parameters by two-beam femtosecond lasers interference
会议论文
作者:
Wang, Xianhua
;
Chen, Feng
;
Liu, Hewei
;
Bian, Hao
;
Yang, Qing
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/10
Micro-fabrication
Periodic structure
Interference
Micro-grating
Femtosecond laser pulse
Design and thermal analysis of a micro-chamber PCR integrated chip
期刊论文
Chinese Journal of Sensors and Actuators, 2011, 卷号: 24, 期号: [db:dc_citation_issue], 页码: 1092-1097
作者:
Liu, Yimin
;
Nie, Jinquan
;
Zhao, Yulong
;
Peng, Niancai
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/10
Lumped parameter method
Micromachining technology
Pcr chip
Thermal analysis
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