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浏览/检索结果: 共1条，第1-1条 帮助 限定条件 内容类型：会议论文    专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Research on automatic Hartmann test of membrane mirror (EI CONFERENCE) 会议论文 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China Zhong X.; Jin G.; Liu C.; Zhang P. 收藏  |  浏览/下载：21/0  |  提交时间：2013/03/25 Electrostatic membrane mirror is ultra-lightweight and easy to acquire a large diameter comparing with traditional optical elements  so its development and usage is the trend of future large mirrors. In order to research the control method of the static stretching membrane mirror  the surface configuration must be tested. However  membrane mirror's shape is always changed by variable voltages on the electrodes  and the optical properties of membrane materials using in our experiment are poor  so it is difficult to test membrane mirror by interferometer and null compensator method. To solve this problem  an automatic optical test procedure for membrane mirror is designed based on Hartmann screen method. The optical path includes point light source  CCD camera  splitter and diffuse transmittance screen. The spots' positions on the diffuse transmittance screen are pictured by CCD camera connected with computer  and image segmentation and centroid solving is auto processed. The CCD camera's lens distortion is measured  and fixing coefficients are given to eliminate the spots' positions recording error caused by lens distortion. To process the low sampling Hartmann test results  Zernike polynomial fitting method is applied to smooth the wave front. So low frequency error of the membrane mirror can be measured then. Errors affecting the test accuracy are also analyzed in this paper. The method proposed in this paper provides a reference for surface shape detection in membrane mirror research. 2010 Copyright SPIE - The International Society for Optical Engineering.