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Germanium movement mechanism in SiGe-on-insulator fabricated by modified Ge condensation 期刊论文
JOURNAL OF APPLIED PHYSICS, 2005, 卷号: 97, 期号: 6, 页码: 64504-64504
Di, ZF; Chu, PK; Zhang, M; Liu, WL; Song, ZT; Lin, CL
收藏  |  浏览/下载:30/0  |  提交时间:2012/03/24
Relaxed silicon-germanium-on-insulator substrates by oxygen implantation into pseudomorphic silicon germanium/silicon heterostructure 期刊论文
APPLIED PHYSICS LETTERS, 2003, 卷号: 82, 期号: 15, 页码: 2452-2454
An, ZH; Wu, YJ; Zhang, M; Di, ZF; Lin, CL; Fu, RKY; Chen, P; Chu, PK; Cheung, WY; Wong, SP
收藏  |  浏览/下载:12/0  |  提交时间:2012/03/24


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