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Interfacial and optical properties of YOxNy gate dielectrics at different deposition temperatures 期刊论文
journal of physics d: applied physics, 2009, 期号: 42
X J Wang; L D Zhang; G He; L Q Zhu; M Liu; J P Zhang
收藏  |  浏览/下载:21/0  |  提交时间:2010/02/26
Thickness-modulated optical dielectric constants and band alignments of HfOxNy gate dielectrics 期刊论文
journal of applied physics, 2009, 期号: 105
G. He; L. D. Zhang; M. Liu; J. P. Zhang; X. J. Wang; C. M. Zhen
收藏  |  浏览/下载:5/0  |  提交时间:2010/03/18
Effect of thermal treatment on the band offsets and interfacial properties of HfOxNy gate dielectrics 期刊论文
j. phys. d: appl. phys., 2009, 期号: 42
作者:  Q Fang
收藏  |  浏览/下载:18/0  |  提交时间:2010/02/02
Structural and optical properties of nitrogen-incorporated HfO2 gate dielectrics deposited by reactive sputtering 期刊论文
applied surface science, 2007, 期号: 253
G. He; Q. Fang; G.H. Li; J.P. Zhang; L.D. Zhang
收藏  |  浏览/下载:9/0  |  提交时间:2010/07/16
Characterization of HfOxNy gate dielectrics using a hafnium oxide as target 期刊论文
applied surface science, 2006, 期号: 252
M. Liu; Q. Fang; G. He; L.Q. Zhu; L.D. Zhang
收藏  |  浏览/下载:19/0  |  提交时间:2010/07/20
Spectroscopic ellipsometry characterization of nitrogen-incorporated HfO2 gate dielectrics grown by radio-frequency reactive sputtering 期刊论文
applied physics letters, 2005, 期号: 86
G. He; L. D. Zhang; G. H. Li; M. Liu; L. Q. Zhu; S. S. Pan
收藏  |  浏览/下载:31/0  |  提交时间:2010/08/30


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