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浏览/检索结果: 共3条，第1-3条 帮助 限定条件 发表日期：2019     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Large range nano alignment for proximity lithography using complex grating 期刊论文 Optics and Laser Technology, 2019, 卷号: 112, 页码: 101-106 作者:  Tang, Yan;  Liu, Junbo;  Yang, Yong;  Hu, Song;  Zhao, Lixin 收藏  |  浏览/下载：8/0  |  提交时间：2021/05/06 Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文 Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355 作者:  Y.Song;  Bayanheshig;  S.Li;  S.Jiang;  W.Wang 收藏  |  浏览/下载：0/0  |  提交时间：2020/08/24 Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics   Design and Assessment of a 6-DOF Micro/Nanopositioning System 期刊论文 Ieee-Asme Transactions on Mechatronics, 2019, 卷号: 24, 期号: 5, 页码: 2097-2107 作者:  D.F.Zhang;  P.Z.Li;  J.G.Zhang;  H.N.Chen;  K.Guo 收藏  |  浏览/下载：7/0  |  提交时间：2020/08/24 Fasteners,Solid modeling,Optics,Physics,Actuators,Manufacturing,processes,End effectors,Flexure mechanisms,mechanical design,micro,nanopositioning,parallel positioning system,six degree-of-freedom,(6-DOF),purpose positioner-fixture,parallel manipulator,stage,mechanism,2-dof,3-dof,Automation & Control Systems,Engineering