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Interface properties and bias temperature instability with ternary H-Cl-N mixed plasma post-oxidation annealing in 4H-SiC MOS capacitors 期刊论文
APPLIED SURFACE SCIENCE, 2019, 卷号: 488, 页码: 293-302
作者:  Yang, Chao;  Zhang, Fanglong;  Yin, Zhipeng;  Su, Yan;  Qin, Fuwen
收藏  |  浏览/下载:11/0  |  提交时间:2019/12/02
Interfacial traps and mobile ions induced flatband voltage instability in 4H-SiC MOS capacitors under bias temperature stress 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 卷号: 52
作者:  Yang, Chao;  Gu, Zhenghao;  Yin, Zhipeng;  Qin, Fuwen;  Wang, Dejun
收藏  |  浏览/下载:11/0  |  提交时间:2019/12/02


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