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浏览/检索结果: 共2条，第1-2条 帮助 限定条件 发表日期：2016    专题：光电技术研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Positioning control system of three-dimensional wafer stage of lithography 期刊论文 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850T 作者:  Tian, Peng;  Yan, Wei;  Yang, Fan;  Li, Fanxing;  Hu, Song 收藏  |  浏览/下载：22/0  |  提交时间：2018/06/14 Closed Loop Systems  Control Systems  Lithography  Manufacture  Materials Testing  Optical Devices  Pulse Width Modulation  Stepping Motors   A method on error analysis for large-aperture optical telescope control system 期刊论文 Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2016, 卷号: 9682, 页码: 96820C 作者:  Su, Yanrui;  Wang, Qiang;  Yan, Fabao;  Liu, Xiang;  Huang, Yongmei 收藏  |  浏览/下载：18/0  |  提交时间：2018/06/14 Control Systems  Error Analysis  Errors  Feedback  Frequency Domain Analysis  Jitter  Manufacture  Metal Drawing  Mirrors  Optical Telescopes  Optical Testing  Speed  Units Of Measurement