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DROP TO MEASURE: A NOVEL NANOFLUIDIC CRYSTAL SENSING SCHEME WITH IMPROVED CHIP-TO-CHIP DATA CONSISTENCY FOR PORTABLE BIOCHEMICAL DETECTION 其他
2015-01-01
Wang, Baojun; Zhao, Wenda; Zhang, Rui; Wang, Wei
收藏  |  浏览/下载:2/0  |  提交时间:2017/12/03
TRIBOELECTRIFICATION BASED ACTIVE SENSOR FOR POLYMER DISTINGUISHING 其他
2015-01-01
Meng, B.; Cheng, X. L.; Han, M. D.; Chen, H. T.; Zhu, F. Y.; Zhang, H. X.
收藏  |  浏览/下载:3/0  |  提交时间:2017/12/03
NEMS VARIABLE OPTICAL ATTENUATOR (VOA) DRIVEN BY OPTICAL FORCE 其他
2015-01-01
Dong, B.; Cai, H.; Gu, Y. D.; Yang, Z. C.; Jin, Y. F.; Hao, Y. L.; Kwong, D. L.; Liu, A. Q.
收藏  |  浏览/下载:5/0  |  提交时间:2017/12/03
3D MORPHOLOGY RECONSTRUCTION OF HIGH ASPECT RATIO MEMS STRUCTURE BY USING AUTOFLUORESCENCE OF PARYLENE C 其他
2015-01-01
Zhang, Lingqian; Liu, Yaoping; Yang, Fang; Wang, Wei; Zhang, Dacheng; Li, Zhihong
收藏  |  浏览/下载:2/0  |  提交时间:2017/12/03
Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50/1 aspect ratio 其他
2015-01-01
Liu, Peng; Yang, Fang; Wang, Wei; Luo, Kui; Wang, Ying; Zhang, Dacheng
收藏  |  浏览/下载:4/0  |  提交时间:2017/12/03
谐振式微型电场传感器芯片级真空封装及测试 期刊论文
电子与信息学报, 2015
毋正伟; 彭春荣; 杨鹏飞; 闻小龙; 李冰; 夏善红
收藏  |  浏览/下载:4/0  |  提交时间:2017/12/03
Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects 期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015
Fang, Dongming; Zheng, Fengjie; Chen, Bo; Wang, Yu; Fang, Yigeng; Yang, Pengfei; Wen, Xiaolong; Peng, Chunrong; Xia, Shanhong
收藏  |  浏览/下载:2/0  |  提交时间:2017/12/03
BONDING-FRIENDLY PCPDMS: DEPOSITING PARYLENE C INTO PDMS MATRIX AT AN ELEVATED TEMPERATURE 其他
2015-01-01
Liu, Yaoping; Zhang, Lingqian; Wang, Wei; Wu, Wengang
收藏  |  浏览/下载:4/0  |  提交时间:2017/12/03
Nano-optomechanical static random access memory (SRAM) 其他
2015-01-01
Dong, B.; Cai, H.; Gu, Y.D.; Yang, Z.C.; Jin, Y.F.; Hao, Y.L.; Kwong, D.L.; Liu, A.Q.
收藏  |  浏览/下载:6/0  |  提交时间:2017/12/03
A THREE-STEP MODEL OF BLACK SILICON FORMATION IN DEEP REACTIVE ION ETCHING PROCESS 其他
2015-01-01
Zhu, Fuyun; Wang, Chen; Zhang, Xiaosheng; Zhao, Xin; Zhang, Haixia
收藏  |  浏览/下载:3/0  |  提交时间:2017/12/03


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