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科研机构
光电技术研究所 [15]
内容类型
会议论文 [15]
发表日期
2014 [15]
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ARM proces... [1]
Actuators ... [1]
Alignment ... [1]
Amplifiers... [1]
Applicatio... [1]
Aspherics ... [1]
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共15条,第1-10条
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发表日期:2014
专题:光电技术研究所
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Design of twin computer-generated hologram for absolute testing of aspheric surfaces
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2014
作者:
Feng, Jie
;
Deng, Chao
;
Xing, Tingwen
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2016/11/23
Dynamic compensation for the lithographic object lens
会议论文
Proceedings of SPIE: Optical System Alignment, Tolerancing, and Verification VIII, 2014
作者:
Zhu, Hongwei
;
Xing, Tingwen
;
Chen, Zexiang
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2016/11/23
Research development of thermal aberration in 193nm lithography exposure system
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Wang, Yueqiang
;
Liu, Yong
收藏
  |  
浏览/下载:21/0
  |  
提交时间:2016/11/23
Athermal design for infrared refractive/diffractive/reflective hybrid optical system
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2014
作者:
Cheng, Ximin
;
Xie, Weimin
;
Bai, Yu
;
Jia, Xin
;
Xing, Tingwen
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2016/11/23
Intelligent control system based on ARM for lithography tool
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Chen, Changlong
;
Tang, Xiaoping
;
Hu, Song
;
Wang, Nan
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2016/11/24
The design of an active support control system for a thin 1.2m primary mirror
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2014
作者:
Liu, Rong
;
Li, Xiaojin
;
Liu, Haitao
;
Wang, Hongqiao
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2016/11/24
Testing the large convex aspheric surfaces with aspheric test plate
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2014
作者:
Zhang, Yong-Hong
;
Chen, Qiang
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2016/11/24
Adaptive optics vision simulator based on 35 element bimorph deformable mirror
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2014
作者:
Zhao, Lina
;
Dai, Yun
;
Xiao, Fei
;
Kang, Jian
;
Zhao, Haoxin
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2016/11/24
Design of high-bandwidth FSM driving circuit of ATP system for laser communications
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2014
作者:
Lin, Jun-Lan
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2016/11/23
A hybrid algorithm for the design of diffractive optical element for beam shaping
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Yin, Kewei
;
Huang, Zhiqiang
;
Lin, Wumei
;
Xing, Tingwen
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2016/11/23
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