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Influence of background pressure on the microstructure and optical properties of Mo/Si multilayers fabricated by magnetron sputtering 期刊论文
Science China: Physics, Mechanics and Astronomy, 2013, 卷号: 56, 期号: 9
Lv P.; Zhang Z.; Guan J.; Wang X.; Hou X.; Zhang L.; Wang J.; Chen B.; Guan Q.
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