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磁头滑块的湿法与干法刻蚀实验研究 期刊论文
2010, 2010
谭晓兰; 孟永钢; 李宁; 林晶; TAN Xiao-lan; MENG Yong-gang; LI Ning; LIN Jing
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Gray-tone lithography for micro opto-device of arbitrary 3D shaped surfaces 期刊论文
2010, 2010
Shi Jun-Feng; Zhang Guang-Guo; Wang Dong-Sheng
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Influence of configurations of chamber and coil on uniformity of plasma distribution for inductively coupled plasma etcher 会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Cheng Jia; Zhu Yu
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