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Evolution of structural defects in SiOx films fabricated by electron cyclotron resonance plasma chemical vapour deposition upon annealing treatment 期刊论文
chinese physics letters, 2008, 卷号: 25, 期号: 3, 页码: 1034-1037
Hao, XP; Wang, BY; Yu, RS; Wei, L; Wang, H; Zhao, DG; Hao, WC
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