FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process

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	FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process
	Shen Li-Jun 1,2; Wan Yong-Jian 1; Meng Kai 1,2; Huang Chuan-Ke 1,2
刊名	OPTICAL REVIEW
	2015-06-01
卷号	22 期号:3 页码:393-401
关键词	FEM/SPH simulation Traditional polishing K9 glass Ceria particle Surface roughness
英文摘要	Surface roughness is one of the most important parameters of surface quality and a difficult technical issue in glass polishing, especially for traditional polishing. In this paper, the coupled algorithm of FEM/SPH has been used to simulate the deformation of brittle K9 glass in traditional polishing. The influences of polishing particle size and insert depth on surface roughness are analyzed in detail. Then, experiment is carried out on a empty set 100 mm flat K9 mirror with three sorts of particle, ceria abrasive particle with 1.2, 1.6 and 2 mu m. Simulation and experiment results show that surface roughness of brittle glass has direct relationship with particle size during traditional polishing process. The surface roughness is better as the particle size is smaller.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	HYDRODYNAMICS
收录类别	SCI
语种	英语
WOS记录号	WOS:000355599500002
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3658]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Shen Li-Jun,Wan Yong-Jian,Meng Kai,et al. FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process[J]. OPTICAL REVIEW,2015,22(3):393-401.
APA	Shen Li-Jun,Wan Yong-Jian,Meng Kai,&Huang Chuan-Ke.(2015).FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process.OPTICAL REVIEW,22(3),393-401.
MLA	Shen Li-Jun,et al."FEM/SPH simulation research and experiment of surface roughness based on traditional polishing process".OPTICAL REVIEW 22.3(2015):393-401.