Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers

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	Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers
	Zhang, Xiren 1,2; Li, Bincheng 1; Gao, Chunming 1
刊名	JOURNAL OF APPLIED PHYSICS
	2008-02-01
卷号	103 期号:3
英文摘要	Simulations are performed to investigate the uniqueness of simultaneous determination of electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of silicon wafers by laterally resolved modulated free carrier absorption (MFCA) and multiparameter fitting. The dependences of MFCA amplitude and phase on these transport properties at different pump-probe-beam separations and modulation frequencies are analyzed. The uncertainties of the fitted parameter values are analyzed by investigating the dependences of a mean square variance including both the amplitude error and phase error on corresponding electronic transport parameters. Simulation results show that the electronic transport parameters can be determined accurately through fitting experimental MFCA data carrying both frequency- and space-domain information of carrier diffusion to a rigorous MFCA model. Among the three transport parameters, the carrier diffusivity can be determined most precisely, with an uncertainty of less than +/- 5%, due to the highest sensitivity of the laterally resolved MFCA signal to the diffusivity. The highly accurate determination of the diffusivity further improves the precision of the carrier lifetime and the front surface recombination velocity values simultaneously determined via multiparameter fitting. Experiments were performed with a silicon wafer and the results were in good agreement with the theoretical simulations. (C) 2008 American Institute of Physics.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	SURFACE RECOMBINATION VELOCITY ; BULK LIFETIME ; SI WAFERS ; PHOTOTHERMAL MICROSCOPY ; 3-DIMENSIONAL THEORY ; SEMICONDUCTORS ; RADIOMETRY ; TRANSIENTS ; DEPENDENCE ; TEMPERATURE
收录类别	SCI
语种	英语
WOS记录号	WOS:000253238100041
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3648]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Zhang, Xiren,Li, Bincheng,Gao, Chunming. Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers[J]. JOURNAL OF APPLIED PHYSICS,2008,103(3).
APA	Zhang, Xiren,Li, Bincheng,&Gao, Chunming.(2008).Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers.JOURNAL OF APPLIED PHYSICS,103(3).
MLA	Zhang, Xiren,et al."Sensitivity analysis of laterally resolved free carrier absorption determination of electronic transport properties of silicon wafers".JOURNAL OF APPLIED PHYSICS 103.3(2008).