Micro-optical devices formed by a dynamic photolithographic approach

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	Micro-optical devices formed by a dynamic photolithographic approach
	Du, Chunlei; Dong, Xiaochun; Deng, Qiling; Shi, Lifang; Luo, Xiangang; Zhang, Yudong
刊名	JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
	2008-06-01
卷号	10 期号:6
关键词	microoptical structure microlens array microlithography
英文摘要	We outline a unique photolithographic approach, by employing both periodic and aperiodic binary moving masks, that is developed for forming micro-optical structures effectively with a continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for a binary moving mask is described. Finally, concrete micro-optical devices with continuous microprofiles, including a microlens array with different sub-apertures and an irregular distributed phase plate, are demonstrated and evaluated.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	FABRICATION ; ARRAY ; MICROLENSES
收录类别	SCI ; ISTP
语种	英语
WOS记录号	WOS:000256619700008
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3644]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Du, Chunlei,Dong, Xiaochun,Deng, Qiling,et al. Micro-optical devices formed by a dynamic photolithographic approach[J]. JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2008,10(6).
APA	Du, Chunlei,Dong, Xiaochun,Deng, Qiling,Shi, Lifang,Luo, Xiangang,&Zhang, Yudong.(2008).Micro-optical devices formed by a dynamic photolithographic approach.JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,10(6).
MLA	Du, Chunlei,et al."Micro-optical devices formed by a dynamic photolithographic approach".JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS 10.6(2008).