Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique

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	Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique
	Liu, Mingqiang 1; Li, Bincheng 1; Wang, Yanru 1,2
刊名	APPLIED PHYSICS LETTERS
	2009-03-30
卷号	94 期号:13
关键词	calorimetry deformation measurement by laser beam nanomechanics optical elements optical films optical testing silicon compounds thermal lensing wavefront sensors
英文摘要	Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10%, respectively.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Physics, Applied
研究领域[WOS]	Physics
关键词[WOS]	COATINGS
收录类别	SCI
语种	英语
WOS记录号	WOS:000264888500016
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/3277]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 2.Chinese Acad Sci, Grad Sch, Beijing 100090, Peoples R China
推荐引用方式 GB/T 7714	Liu, Mingqiang,Li, Bincheng,Wang, Yanru. Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique[J]. APPLIED PHYSICS LETTERS,2009,94(13).
APA	Liu, Mingqiang,Li, Bincheng,&Wang, Yanru.(2009).Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique.APPLIED PHYSICS LETTERS,94(13).
MLA	Liu, Mingqiang,et al."Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique".APPLIED PHYSICS LETTERS 94.13(2009).