Focal length measurement of a microlens-array by grating shearing interferometry

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 光电技术研究所被WoS收录文章

	Focal length measurement of a microlens-array by grating shearing interferometry
	Zhu, Xianchang; Hu, Song; Zhao, Lixin
刊名	APPLIED OPTICS
	2014-10-10
卷号	53 期号:29 页码:6663-6669
英文摘要	Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. (C) 2014 Optical Society of America
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	FABRICATION ; DESIGN
收录类别	SCI
语种	英语
WOS记录号	WOS:000343160200041
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/2449]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Sichuan, Peoples R China
推荐引用方式 GB/T 7714	Zhu, Xianchang,Hu, Song,Zhao, Lixin. Focal length measurement of a microlens-array by grating shearing interferometry[J]. APPLIED OPTICS,2014,53(29):6663-6669.
APA	Zhu, Xianchang,Hu, Song,&Zhao, Lixin.(2014).Focal length measurement of a microlens-array by grating shearing interferometry.APPLIED OPTICS,53(29),6663-6669.
MLA	Zhu, Xianchang,et al."Focal length measurement of a microlens-array by grating shearing interferometry".APPLIED OPTICS 53.29(2014):6663-6669.