Collimation Sensing With Differential Grating and Talbot Interferometry

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 光电技术研究所被WoS收录文章

	Collimation Sensing With Differential Grating and Talbot Interferometry
	Wang, Nan 1,2; Tang, Yan 1; Jiang, Wei 1; Yan, Wei 1; Hu, Song 1
刊名	IEEE PHOTONICS JOURNAL
	2014-06-01
卷号	6 期号:3
关键词	Collimation testing moire fringe differential grating
英文摘要	The collimation of monochromatic light in optical metrology is of great importance for its determination of the accuracy of physical measurement. This paper proposes a novel collimation testing method with the differential grating (DG) characterized by its high sensitivity. In the process of measurement, the monochromatic light is incident upon a linear grating and is then projected onto a DG to create two sets of linear moire fringes. By analyzing the relationship between the phase of moire fringes and the divergence or convergence angle, the collimation of monochromatic light can be easily measured. Compared with the traditional collimation methods, this method is more accurate with an experimental accuracy of 10(-7) rad, which is in good agreement with the theoretical prediction.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Optics ; Physics, Applied
研究领域[WOS]	Engineering ; Optics ; Physics
关键词[WOS]	MOIRE FRINGE ; PROXIMITY LITHOGRAPHY ; BEAM COLLIMATION ; ALIGNMENT
收录类别	SCI
语种	英语
WOS记录号	WOS:000340830400025
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/2437]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
推荐引用方式 GB/T 7714	Wang, Nan,Tang, Yan,Jiang, Wei,et al. Collimation Sensing With Differential Grating and Talbot Interferometry[J]. IEEE PHOTONICS JOURNAL,2014,6(3).
APA	Wang, Nan,Tang, Yan,Jiang, Wei,Yan, Wei,&Hu, Song.(2014).Collimation Sensing With Differential Grating and Talbot Interferometry.IEEE PHOTONICS JOURNAL,6(3).
MLA	Wang, Nan,et al."Collimation Sensing With Differential Grating and Talbot Interferometry".IEEE PHOTONICS JOURNAL 6.3(2014).