Fabrication of circular microstructure array based on a controlled diffractive pattern

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	Fabrication of circular microstructure array based on a controlled diffractive pattern
	Li, Shuhong 1,2; Du, Jinglei 1; Zhang, Zhiyou 1; Gao, Fuhua 1; Gao, Hongtao 2; Du, Chunlei 2
刊名	MICROELECTRONIC ENGINEERING
	2014-03-01
卷号	115 页码:13-15
关键词	Lithography Circular microstructure Diffractive pattern
英文摘要	Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 mu m was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. (C) 2013 Elsevier B.V. All rights reserved.
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
研究领域[WOS]	Engineering ; Science & Technology - Other Topics ; Optics ; Physics
关键词[WOS]	RADIALLY POLARIZED-LIGHT ; SURFACE-PLASMONS ; TRANSMISSION ; LITHOGRAPHY ; APERTURE ; BEAM ; LENS
收录类别	SCI
语种	英语
WOS记录号	WOS:000330502700004
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/2415]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Sichuan Univ, Sch Phys, Chengdu 610064, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
推荐引用方式 GB/T 7714	Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. MICROELECTRONIC ENGINEERING,2014,115:13-15.
APA	Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,Gao, Fuhua,Gao, Hongtao,&Du, Chunlei.(2014).Fabrication of circular microstructure array based on a controlled diffractive pattern.MICROELECTRONIC ENGINEERING,115,13-15.
MLA	Li, Shuhong,et al."Fabrication of circular microstructure array based on a controlled diffractive pattern".MICROELECTRONIC ENGINEERING 115(2014):13-15.