Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer

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	Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer
	Zhu, Mingxin 1; Bai, Fuzhong 1; Gan, Shiming 1; Huang, Kaizheng 1; Huang, Linhai 2; Wang, Jianxin 3
刊名	OPTIK
	2013
卷号	124 期号:22 页码:5624-5627
关键词	Phase-shifting algorithm Phase extraction Phase shift deviation Detector nonlinearity
英文摘要	The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm. (C) 2013 Elsevier GmbH. All rights reserved.
WOS标题词	Science & Technology ; Physical Sciences
类目[WOS]	Optics
研究领域[WOS]	Optics
关键词[WOS]	STEPPING INTERFEROMETRY ; SURFACES
收录类别	SCI
语种	英语
WOS记录号	WOS:000325835400074
公开日期	2015-12-24
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/1225]
专题	光电技术研究所_光电技术研究所被WoS收录文章
作者单位	1.Inner Mongolia Univ Technol, Coll Mech Engn, Hohhot 010051, Peoples R China 2.Chinese Acad Sci, Inst Opt & Elect, Lab Adapt Opt, Chengdu 610209, Peoples R China 3.Southwest Univ Sci & Technol, Coll Sci, Mianyang 621010, Peoples R China
推荐引用方式 GB/T 7714	Zhu, Mingxin,Bai, Fuzhong,Gan, Shiming,et al. Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer[J]. OPTIK,2013,124(22):5624-5627.
APA	Zhu, Mingxin,Bai, Fuzhong,Gan, Shiming,Huang, Kaizheng,Huang, Linhai,&Wang, Jianxin.(2013).Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer.OPTIK,124(22),5624-5627.
MLA	Zhu, Mingxin,et al."Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer".OPTIK 124.22(2013):5624-5627.