Quantitative analysis of oxygen content in copper oxide films using ultra microbalance

	Quantitative analysis of oxygen content in copper oxide films using ultra microbalance
	Shu YH(舒勇华); Liu C(刘崇); Wang LH(王连红); Fan J(樊菁)
	2014
会议名称	The 29th International Symposium on Rarefied Gas Dynamics
会议日期	2014-07-13
会议地点	中国陕西西安
关键词	quartz chamber minutes heated vacuum
中文摘要	The oxygen content is one of the key factors that determine the property of the functional oxide films,and it is important to detect the oxygen content accurately.In this article,we try to analyze the oxygen content in copper oxide films using ultra microbalance.The Copper oxide films were prepar...
会议网址	http://dx.doi.org/10.1063/1.4902628
会议录	Proceedings of 29th International Symposium on Rarefied Gas Dynamics
语种	英语
内容类型	会议论文
源URL	[http://dspace.imech.ac.cn/handle/311007/55208]
专题	力学研究所_高温气体动力学国家重点实验室
推荐引用方式 GB/T 7714	Shu YH,Liu C,Wang LH,et al. Quantitative analysis of oxygen content in copper oxide films using ultra microbalance[C]. 见:The 29th International Symposium on Rarefied Gas Dynamics. 中国陕西西安. 2014-07-13.http://dx.doi.org/10.1063/1.4902628.