一种半导体生产线搬运系统设备仿真方法 | |
于海斌![]() ![]() ![]() | |
2015-05-20 | |
专利国别 | 中国 |
专利号 | CN104635506A |
专利类型 | 发明 |
产权排序 | 1 |
权利人 | 中国科学院沈阳自动化研究所 |
其他题名 | Equipment simulation method of semiconductor production line conveying system |
中文摘要 | 本发明涉及一种半导体生产线搬运系统设备仿真方法,包括以下步骤:添加设备并使其上线;设备发送注册信息给控制系统,将设备的初始状态信息发送给控制系统,控制系统根据设备初始状态分配设备操作并进行监控;设备接收到控制系统的动作指令后,设备查询自身的状态信息,并根据自身状态进行动作,将动作结果反馈给控制系统;否则设备将失败信息反馈给控制系统,设备等待下一次的动作指令,直到设备下线;设备接收到控制系统的监控指令后,周期性将自身的状态信息发送给控制系统;下线并删除设备。本发明通过模拟设备软件与控制系统之间的通信,来进行模拟设备的动作控制,设备的动作时间可控,极大的节省了调试所使用的时间。 |
是否PCT专利 | 否 |
英文摘要 | The invention relates to an equipment simulation method of a semiconductor production line conveying system. The equipment simulation method includes that equipment is added and made online; the equipment sends registration information to a control system, initial state information of the equipment is sent to the control system, and according to the initial state of the equipment, the control system distributes operation processes to the equipment and monitors the equipment; after receives an action command of the control system, the equipment inquires the state information thereof, acts according to the state information thereof and feeds an action result back to the control system; otherwise, the equipment feeds failure information back to the control system and waits the next action command until off the line; after receives a monitoring command of the control system, the equipment periodically sends the state information thereof to the control system; the equipment is subjected to being off the line and deleted. According to the arrangement, by simulating communication between the equipment software and the control system, the equipment simulating action is controlled, and the equipment action time is controllable, accordingly greatly saving debugging time. |
申请日期 | 2013-11-07 |
语种 | 中文 |
专利申请号 | CN201310557698.2 |
专利代理 | 沈阳科苑专利商标代理有限公司 21002 |
内容类型 | 专利 |
源URL | [http://ir.sia.ac.cn/handle/173321/15939] ![]() |
专题 | 沈阳自动化研究所_工业控制网络与系统研究室 |
推荐引用方式 GB/T 7714 | 于海斌,徐皑冬,刘明哲,等. 一种半导体生产线搬运系统设备仿真方法. CN104635506A. 2015-05-20. |
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