Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms

	Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms
	Luo X.
刊名	中文 Optics Letters
	2014
卷号	12
ISSN号	ISBN/16717694
英文摘要	Swing arm profilometer is a useful metrology tool for large optics. For larger mirrors, the testing accuracy decreases as the arm becomes longer, while the testing accuracy requirement remains the same. We introduce a simple solution to make testing of large mirrors with shorter arms possible, which improves the testing accuracy, especially reduces the uncertainty of low-order shapes like astigmatism and trefoil. Simulation and experiment results show that testing uncertainty of low-order shape and high-frequency errors reaches 0.1 m RMS, which faithfully meets the requirement of profile testing to guide the grinding and coarse polishing process.
收录类别	EI
语种	英语
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/44425]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Luo X.. Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms[J]. 中文 Optics Letters,2014,12.
APA	Luo X..(2014).Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms.中文 Optics Letters,12.
MLA	Luo X.."Swing arm profilometer: improving the testing accuracy of large mirrors with shorter arms".中文 Optics Letters 12(2014).